
Cross-section of a nanoscale trench (dimensions of 90 nm wide
and 500 nm high), fabricated with an initial seed layer of copper, later filled
with electrodeposited nickel. Transmission electron microscopy and
compositional mapping reveal salient features on the nanometer scale: electron
energy loss spectroscopy was used to generate a compositional map (left), where
the red color indicates copper and blue denotes the nickel region. The
cross-sectional TEM image (right) reveals microstructural features (note the
planar twins in the copper seed layer). Such information supports the
development of new electrodeposition metrology techniques for micro- and
nano-electromechanical devices (MEMS/NEMS).
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