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MSEL Electron Microscopy Facility



The electron microscopy facility is jointly administered by the Metallurgy and Ceramics Divisions of the Materials Science and Engineering Laboratory. Please visit the image gallery to see the latest results in materials research. The MSEL EM Facility includes: two TEMs, two SEMs, specimen preparation equipment, and an image analysis center.

Access to MSEL EM Facilities are available to NIST staff and NIST guest researchers.
jeol3010

JEOL JEM3010

JEOL JEM3010 UHR-TEM
  • 300 keV accelerating voltage
  • 0.17 nm point-to-point resolution
  • ±15° specimen tilt
  • Energy loss spectroscopy
  • Energy-filtered imaging (atomic scale)
  • X-ray microanalysis
  • MSC-CCD image acquisition
  • Scanning TEM capability
  • High temperature holder
  • Analytical specimen holder
s4700

Hitachi S-4700-II FE-SEM

Hitachi S-4700-II FE-SEM
  • 1 to 30 keV accelerating voltage
  • 1.5 nm resolution at 30 keV
  • 2.5 nm resolution at 1 keV
  • 70° specimen tilt
  • Electron back-scatter detector (CCD) system
  • Phase ID capability
  • X-ray microanalysis
  • Specimen sizes up to 150 mm diameter wafer
cm30

FEI CM30

FEI CM30 TEM
  • 300 keV accelerating voltage
  • 0.22 nm point-to-point resolution
  • ±40° specimen tilt
  • X-ray microanalysis
  • Parallel energy loss spectroscopy
  • CCD camera
  • High temperature double-tilt holder
  • Low temperature single-tilt holder
  • Analytical double-tilt holder
jsm6400

JEOL JSM6400 SEM

JEOL JSM6400 SEM
  • 5 to 30 keV accelerating voltage
  • 5 nm resolution at 30 keV
  • Electron back-scatter detector system
  • Phase ID capability
  • >70° specimen tilt
  • X-ray microanalysis

specprep

Specimen Prep

Specimen Preparation
  • VCR Dimpler
  • Dimple Grinder
  • Tripod wedge polishers
  • Precision ion-polishing system (PIPS)
  • XLA2000 low angle ion mill (w/cold stage, ion termination)
  • Duo ion mill (w/cold stage)
  • Ultrasonic disc cutter
  • Diamond blade wafer cutter
  • Optical microscopes with digital image acquisition

image

Image Analysis

Image Analysis
  • Macintosh workstations
  • MS-Windows workstations
  • Accelrys image simulation software
  • 9600 ppi (16-bit) image scanner
  • 4800 ppi (14-bit) image scanner
  • Dye-sublimation printers
  • 35 mm slide machine
  • Lots o' software
  • Coffee...
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Last modified: Monday, 26 September, 2005 by Metallurgy Webmeister