MSEL Electron Microscopy Facility

The electron microscopy facility is jointly administered by the Metallurgy and Ceramics Divisions of the Materials Science and Engineering Laboratory. Please visit the image gallery to see the latest results in materials research. The MSEL EM Facility includes: two TEMs, two SEMs, specimen preparation equipment, and an image analysis center.

Access to MSEL EM Facilities are available to NIST staff and NIST guest researchers.

JEOL JEM3010	JEOL JEM3010 UHR-TEM 300 keV accelerating voltage 0.17 nm point-to-point resolution ±15° specimen tilt Energy loss spectroscopy Energy-filtered imaging (atomic scale) X-ray microanalysis MSC-CCD image acquisition Scanning TEM capability High temperature holder Analytical specimen holder
Hitachi S-4700-II FE-SEM	Hitachi S-4700-II FE-SEM 1 to 30 keV accelerating voltage 1.5 nm resolution at 30 keV 2.5 nm resolution at 1 keV 70° specimen tilt Electron back-scatter detector (CCD) system Phase ID capability X-ray microanalysis Specimen sizes up to 150 mm diameter wafer
FEI CM30	FEI CM30 TEM 300 keV accelerating voltage 0.22 nm point-to-point resolution ±40° specimen tilt X-ray microanalysis Parallel energy loss spectroscopy CCD camera High temperature double-tilt holder Low temperature single-tilt holder Analytical double-tilt holder
JEOL JSM6400 SEM	JEOL JSM6400 SEM 5 to 30 keV accelerating voltage 5 nm resolution at 30 keV Electron back-scatter detector system Phase ID capability >70° specimen tilt X-ray microanalysis

Specimen Prep

Specimen Preparation

VCR Dimpler
Dimple Grinder
Tripod wedge polishers
Precision ion-polishing system (PIPS)
XLA2000 low angle ion mill (w/cold stage, ion termination)
Duo ion mill (w/cold stage)
Ultrasonic disc cutter
Diamond blade wafer cutter
Optical microscopes with digital image acquisition

Image Analysis

Macintosh workstations
MS-Windows workstations
Accelrys image simulation software
9600 ppi (16-bit) image scanner
4800 ppi (14-bit) image scanner
Dye-sublimation printers
35 mm slide machine
Lots o' software
Coffee...

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